Electron Microscopy-based Automatic Defect Inspection for Semiconductor Manufacturing: A Systematic Review

In this review, automatic defect inspection algorithms that analyze Electron Microscope (EM) images of Semiconductor Manufacturing (SM) products are identified, categorized, and discussed. This is a topic of critical importance for the SM industry as the continuous shrinking of device patterns has led to increasing defectivity and a greater prevalence of higher-resolution imaging tools such as EM. These aspects among others threaten to increase costs as a result of increased inspection time-to-solution and decreased yield, respectively. Relevant research papers were systematically identified in four popular publication databases in January 2024. A total of 103 papers were selected after screening for novel contributions relating to automatic EM image analysis algorithms for semiconductor defect inspection. These papers were then categorized based on the inspection tasks they addressed, their evaluation metrics, and the type of algorithms used. A notable finding from this categorization is that reference-based defect detection algorithms were the most popular algorithm type until 2020 when deep learning-based inspection algorithms became more popular, especially for defect classification. Furthermore, four broader research questions were discussed to come to the following conclusions: (i) the key components of inspection algorithms are set up, pre-processing, feature extraction, and final prediction; (ii) the maturity of the manufacturing process affects the data availability and required sensitivity of inspection algorithms; (iii) key challenges for these algorithms relate to the desiderata of minimizing time-to-solution which pushes for high imaging throughput, reducing manual input during algorithm setup, and higher processing throughput; and (iv) three promising directions for future work are suggested based on gaps in the reviewed literature that address key remaining limitations.

DMON: A Simple yet Effective Approach for Argument Structure Learning

Argument structure learning~(ASL) entails predicting relations between arguments. Because it can structure a document to facilitate its understanding, it has been widely applied in many fields~(medical, commercial, and scientific domains). Despite its broad utilization, ASL remains a challenging task because it involves examining the complex relationships between the sentences in a potentially unstructured discourse. To resolve this problem, we have developed a simple yet effective approach called Dual-tower Multi-scale cOnvolution neural Network~(DMON) for the ASL task. Specifically, we organize arguments into a relationship matrix that together with the argument embeddings forms a relationship tensor and design a mechanism to capture relations with contextual arguments. Experimental results on three different-domain argument mining datasets demonstrate that our framework outperforms state-of-the-art models. The code is available at https://github.com/VRCMF/DMON.git .

Faster Repeated Evasion Attacks in Tree Ensembles

Tree ensembles are one of the most widely used model classes. However, these models are susceptible to adversarial examples, i.e., slightly perturbed examples that elicit a misprediction. There has been significant research on designing approaches to construct such examples for tree ensembles. But this is a computationally challenging problem that often must be solved a large number of times (e.g., for all examples in a training set). This is compounded by the fact that current approaches attempt to find such examples from scratch. In contrast, we exploit the fact that multiple similar problems are being solved. Specifically, our approach exploits the insight that adversarial examples for tree ensembles tend to perturb a consistent but relatively small set of features. We show that we can quickly identify this set of features and use this knowledge to speedup constructing adversarial examples.

Deep Neural Network Benchmarks for Selective Classification

With the increasing deployment of machine learning models in many socially-sensitive tasks, there is a growing demand for reliable and trustworthy predictions. One way to accomplish these requirements is to allow a model to abstain from making a prediction when there is a high risk of making an error. This requires adding a selection mechanism to the model, which selects those examples for which the model will provide a prediction. The selective classification framework aims to design a mechanism that balances the fraction of rejected predictions (i.e., the proportion of examples for which the model does not make a prediction) versus the improvement in predictive performance on the selected predictions. Multiple selective classification frameworks exist, most of which rely on deep neural network architectures. However, the empirical evaluation of the existing approaches is still limited to partial comparisons among methods and settings, providing practitioners with little insight into their relative merits. We fill this gap by benchmarking 18 baselines on a diverse set of 44 datasets that includes both image and tabular data. Moreover, there is a mix of binary and multiclass tasks. We evaluate these approaches using several criteria, including selective error rate, empirical coverage, distribution of rejected instance's classes, and performance on out-of-distribution instances. The results indicate that there is not a single clear winner among the surveyed baselines, and the best method depends on the users' objectives.

Biases in Expected Goals Models Confound Finishing Ability

Expected Goals (xG) has emerged as a popular tool for evaluating finishing skill in soccer analytics. It involves comparing a player's cumulative xG with their actual goal output, where consistent overperformance indicates strong finishing ability. However, the assessment of finishing skill in soccer using xG remains contentious due to players' difficulty in consistently outperforming their cumulative xG. In this paper, we aim to address the limitations and nuances surrounding the evaluation of finishing skill using xG statistics. Specifically, we explore three hypotheses: (1) the deviation between actual and expected goals is an inadequate metric due to the high variance of shot outcomes and limited sample sizes, (2) the inclusion of all shots in cumulative xG calculation may be inappropriate, and (3) xG models contain biases arising from interdependencies in the data that affect skill measurement. We found that sustained overperformance of cumulative xG requires both high shot volumes and exceptional finishing, including all shot types can obscure the finishing ability of proficient strikers, and that there is a persistent bias that makes the actual and expected goals closer for excellent finishers than it really is. Overall, our analysis indicates that we need more nuanced quantitative approaches for investigating a player's finishing ability, which we achieved using a technique from AI fairness to learn an xG model that is calibrated for multiple subgroups of players. As a concrete use case, we show that (1) the standard biased xG model underestimates Messi's GAX by 17% and (2) Messi's GAX is 27% higher than the typical elite high-shot-volume attacker, indicating that Messi is even a more exceptional finisher than people commonly believed.

Generating Explanations in Medical Question-Answering by Expectation Maximization Inference over Evidence

Medical Question Answering~(medical QA) systems play an essential role in assisting healthcare workers in finding answers to their questions. However, it is not sufficient to merely provide answers by medical QA systems because users might want explanations, that is, more analytic statements in natural language that describe the elements and context that support the answer. To do so, we propose a novel approach for generating natural language explanations for answers predicted by medical QA systems. As high-quality medical explanations require additional medical knowledge, so that our system extract knowledge from medical textbooks to enhance the quality of explanations during the explanation generation process. Concretely, we designed an expectation-maximization approach that makes inferences about the evidence found in these texts, offering an efficient way to focus attention on lengthy evidence passages. Experimental results, conducted on two datasets MQAE-diag and MQAE, demonstrate the effectiveness of our framework for reasoning with textual evidence. Our approach outperforms state-of-the-art models, achieving a significant improvement of \textbf{6.86} and \textbf{9.43} percentage points on the Rouge-1 score; \textbf{8.23} and \textbf{7.82} percentage points on the Bleu-4 score on the respective datasets.

Unsupervised Anomaly Detection with Rejection

Anomaly detection aims at detecting unexpected behaviours in the data. Because anomaly detection is usually an unsupervised task, traditional anomaly detectors learn a decision boundary by employing heuristics based on intuitions, which are hard to verify in practice. This introduces some uncertainty, especially close to the decision boundary, that may reduce the user trust in the detector's predictions. A way to combat this is by allowing the detector to reject examples with high uncertainty (Learning to Reject). This requires employing a confidence metric that captures the distance to the decision boundary and setting a rejection threshold to reject low-confidence predictions. However, selecting a proper metric and setting the rejection threshold without labels are challenging tasks. In this paper, we solve these challenges by setting a constant rejection threshold on the stability metric computed by ExCeeD. Our insight relies on a theoretical analysis of such a metric. Moreover, setting a constant threshold results in strong guarantees: we estimate the test rejection rate, and derive a theoretical upper bound for both the rejection rate and the expected prediction cost. Experimentally, we show that our method outperforms some metric-based methods.

How to Allocate your Label Budget? Choosing between Active Learning and Learning to Reject in Anomaly Detection

Anomaly detection attempts at finding examples that deviate from the expected behaviour. Usually, anomaly detection is tackled from an unsupervised perspective because anomalous labels are rare and difficult to acquire. However, the lack of labels makes the anomaly detector have high uncertainty in some regions, which usually results in poor predictive performance or low user trust in the predictions. One can reduce such uncertainty by collecting specific labels using Active Learning (AL), which targets examples close to the detector's decision boundary. Alternatively, one can increase the user trust by allowing the detector to abstain from making highly uncertain predictions, which is called Learning to Reject (LR). One way to do this is by thresholding the detector's uncertainty based on where its performance is low, which requires labels to be evaluated. Although both AL and LR need labels, they work with different types of labels: AL seeks strategic labels, which are evidently biased, while LR requires i.i.d. labels to evaluate the detector's performance and set the rejection threshold. Because one usually has a unique label budget, deciding how to optimally allocate it is challenging. In this paper, we propose a mixed strategy that, given a budget of labels, decides in multiple rounds whether to use the budget to collect AL labels or LR labels. The strategy is based on a reward function that measures the expected gain when allocating the budget to either side. We evaluate our strategy on 18 benchmark datasets and compare it to some baselines.

Adversarial Example Detection in Deployed Tree Ensembles

Tree ensembles are powerful models that are widely used. However, they are susceptible to adversarial examples, which are examples that purposely constructed to elicit a misprediction from the model. This can degrade performance and erode a user's trust in the model. Typically, approaches try to alleviate this problem by verifying how robust a learned ensemble is or robustifying the learning process. We take an alternative approach and attempt to detect adversarial examples in a post-deployment setting. We present a novel method for this task that works by analyzing an unseen example's output configuration, which is the set of predictions made by an ensemble's constituent trees. Our approach works with any additive tree ensemble and does not require training a separate model. We evaluate our approach on three different tree ensemble learners. We empirically show that our method is currently the best adversarial detection method for tree ensembles.

Elastic Product Quantization for Time Series

Analyzing numerous or long time series is difficult in practice due to the high storage costs and computational requirements. Therefore, techniques have been proposed to generate compact similarity-preserving representations of time series, enabling real-time similarity search on large in-memory data collections. However, the existing techniques are not ideally suited for assessing similarity when sequences are locally out of phase. In this paper, we propose the use of product quantization for efficient similarity-based comparison of time series under time warping. The idea is to first compress the data by partitioning the time series into equal length sub-sequences which are represented by a short code. The distance between two time series can then be efficiently approximated by pre-computed elastic distances between their codes. The partitioning into sub-sequences forces unwanted alignments, which we address with a pre-alignment step using the maximal overlap discrete wavelet transform (MODWT). To demonstrate the efficiency and accuracy of our method, we perform an extensive experimental evaluation on benchmark datasets in nearest neighbors classification and clustering applications. Overall, the proposed solution emerges as a highly efficient (both in terms of memory usage and computation time) replacement for elastic measures in time series applications.