With the advancement of diffusion models (DMs) and the substantially increased computational requirements, quantization emerges as a practical solution to obtain compact and efficient low-bit DMs. However, the highly discrete representation leads to severe accuracy degradation, hindering the quantization of diffusion models to ultra-low bit-widths. In this paper, we propose BinaryDM, a novel accurate quantization-aware training approach to push the weights of diffusion models towards the limit of 1-bit. Firstly, we present a Learnable Multi-basis Binarizer (LMB) to recover the representations generated by the binarized DM, which improves the information in details of representations crucial to the DM. Secondly, a Low-rank Representation Mimicking (LRM) is applied to enhance the binarization-aware optimization of the DM, alleviating the optimization direction ambiguity caused by fine-grained alignment. Moreover, a progressive initialization strategy is applied to training DMs to avoid convergence difficulties. Comprehensive experiments demonstrate that BinaryDM achieves significant accuracy and efficiency gains compared to SOTA quantization methods of DMs under ultra-low bit-widths. As the first binarization method for diffusion models, BinaryDM achieves impressive 16.0 times FLOPs and 27.1 times storage savings with 1-bit weight and 4-bit activation, showcasing its substantial advantages and potential for deploying DMs on resource-limited scenarios.