Activation sparsity refers to the existence of considerable weakly-contributed elements among activation outputs. As a prevalent property of the models using the ReLU activation function, it has been proven a promising paradigm to boost model inference efficiency. Nevertheless, most large language models (LLMs) adopt activation functions without intrinsic activation sparsity (e.g., GELU and Swish). Some recent efforts have explored introducing ReLU or its variants as the substitutive activation function to help LLMs achieve activation sparsity and inference acceleration, but few can simultaneously obtain high sparsity and comparable model performance. This paper introduces an effective sparsification method named "ProSparse" to push LLMs for higher activation sparsity without decreasing model performance. Specifically, after substituting the activation function of LLMs with ReLU, ProSparse adopts progressive sparsity regularization with a factor smoothly increasing along sine curves in multiple stages. This can enhance activation sparsity and alleviate performance degradation by avoiding radical shifts in activation distribution. With ProSparse, we obtain high sparsity of 89.32% and 88.80% for LLaMA2-7B and LLaMA2-13B, respectively, achieving comparable performance to their original Swish-activated versions. Our inference acceleration experiments further demonstrate the practical acceleration brought by higher activation sparsity.