Reward models (RM) play a critical role in aligning generations of large language models (LLM) to human expectations. However, prevailing RMs fail to capture the stochasticity within human preferences and cannot effectively evaluate the reliability of reward predictions. To address these issues, we propose Uncertain-aware RM (URM) and Uncertain-aware RM Ensemble (URME) to incorporate and manage uncertainty in reward modeling. URM can model the distribution of disentangled attributes within human preferences, while URME quantifies uncertainty through discrepancies in the ensemble, thereby identifying potential lack of knowledge during reward evaluation. Experiment results indicate that the proposed URM achieves state-of-the-art performance compared to models with the same size, demonstrating the effectiveness of modeling uncertainty within human preferences. Furthermore, empirical results show that through uncertainty quantification, URM and URME can identify unreliable predictions to improve the quality of reward evaluations.