Autonomous programmable microscopic electronic lablets optimized with digital control

Lablets are autonomous microscopic particles with programmable CMOS electronics that can control electrokinetic phenomena and electrochemical reactions in solution via actuator and sensor microelectrodes. In this paper, we describe the design and fabrication of optimized singulated lablets (CMOS3) with dimensions 140x140x50 micrometers carrying an integrated coplanar encapsulated supercapacitor as a rechargeable power supply. The lablets are designed to allow docking to one another or to a smart surface for interchange of energy, electronic information, and chemicals. The paper focusses on the digital and analog design of the lablets to allow significant programmable functionality in a microscopic footprint, including the control of autonomous actuation and sensing up to the level of being able to support a complete lablet self-reproduction life cycle, although experimentally this remains to be proven. The potential of lablets in autonomous sensing and control and for evolutionary experimentation are discussed.

Design and fabrication of autonomous electronic lablets for chemical control

Lablets are autonomous microscopic particles with programmable CMOS electronics that canvcontrol electrokinetic phenomena and electrochemical reactions in solution via actuator and sensor microelectrodes. The lablets are designed to be rechargeable using an integrated supercapacitor, and to allow docking to one another or to a smart surface for interchange of energy, electronic information and chemicals. In this paper, we describe the design and fabrication of singulated lablets (CMOS2) at the scale of 100 by 200 {\mu}m, with the supercap adjacent to the functional lablet and occupying half the space. In other works, we have characterized the supercap and described the electronic design and proven functionality using arrays of these lablets. Here we present fabrication details for integrating functional coatings and the supercap and demonstrate electronic functionality of the lablets following singulation.