Design and fabrication of autonomous electronic lablets for chemical control

Lablets are autonomous microscopic particles with programmable CMOS electronics that canvcontrol electrokinetic phenomena and electrochemical reactions in solution via actuator and sensor microelectrodes. The lablets are designed to be rechargeable using an integrated supercapacitor, and to allow docking to one another or to a smart surface for interchange of energy, electronic information and chemicals. In this paper, we describe the design and fabrication of singulated lablets (CMOS2) at the scale of 100 by 200 {\mu}m, with the supercap adjacent to the functional lablet and occupying half the space. In other works, we have characterized the supercap and described the electronic design and proven functionality using arrays of these lablets. Here we present fabrication details for integrating functional coatings and the supercap and demonstrate electronic functionality of the lablets following singulation.