Scalable Multiple Patterning Layout Decomposition Implemented by a Distribution Evolutionary Algorithm

As the feature size of semiconductor technology shrinks to 10 nm and beyond, the multiple patterning lithography (MPL) attracts more attention from the industry. In this paper, we model the layout decomposition of MPL as a generalized graph coloring problem, which is addressed by a distribution evolutionary algorithm based on a population of probabilistic model (DEA-PPM). DEA-PPM can strike a balance between decomposition results and running time, being scalable for varied settings of mask number and lithography resolution. Due to its robustness of decomposition results, this could be an alternative technique for multiple patterning layout decomposition in next-generation technology nodes.

A Distribution Evolutionary Algorithm for Graph Coloring

Graph Coloring Problem (GCP) is a classic combinatorial optimization problem that has a wide application in theoretical research and engineering. To address complicated GCPs efficiently, a distribution evolutionary algorithm based on population of probability models (DEA-PPM) is proposed. Based on a novel representation of probability model, DEA-PPM employs a Gaussian orthogonal search strategy to explore the probability space, by which global exploration can be realized using a small population. With assistance of local exploitation on a small solution population, DEA-PPM strikes a good balance between exploration and exploitation. Numerical results demonstrate that DEA-PPM performs well on selected complicated GCPs, which contributes to its competitiveness to the state-of-the-art metaheuristics.

A Cuckoo Quantum Evolutionary Algorithm for the Graph Coloring Problem

Based on the framework of the quantum-inspired evolutionary algorithm, a cuckoo quantum evolutionary algorithm (CQEA) is proposed for solving the graph coloring problem (GCP). To reduce iterations for the search of the chromatic number, the initial quantum population is generated by random initialization assisted by inheritance. Moreover, improvement of global exploration is achieved by incorporating the cuckoo search strategy, and a local search operation, as well as a perturbance strategy, is developed to enhance its performance on GCPs. Numerical results demonstrate that CQEA operates with strong exploration and exploitation abilities, and is competitive to the compared state-of-the-art heuristic algorithms.