Iterative Cluster Harvesting for Wafer Map Defect Patterns

Unsupervised clustering of wafer map defect patterns is challenging because the appearance of certain defect patterns varies significantly. This includes changing shape, location, density, and rotation of the defect area on the wafer. We present a harvesting approach, which can cluster even challenging defect patterns of wafer maps well. Our approach makes use of a well-known, three-step procedure: feature extraction, dimension reduction, and clustering. The novelty in our approach lies in repeating dimensionality reduction and clustering iteratively while filtering out one cluster per iteration according to its silhouette score. This method leads to an improvement of clustering performance in general and is especially useful for difficult defect patterns. The low computational effort allows for a quick assessment of large datasets and can be used to support manual labeling efforts. We benchmark against related approaches from the literature and show improved results on a real-world industrial dataset.

Tracking perovskite crystallization via deep learning-based feature detection on 2D X-ray scattering data

Understanding the processes of perovskite crystallization is essential for improving the properties of organic solar cells. In situ real-time grazing-incidence X-ray diffraction (GIXD) is a key technique for this task, but it produces large amounts of data, frequently exceeding the capabilities of traditional data processing methods. We propose an automated pipeline for the analysis of GIXD images, based on the Faster R-CNN deep learning architecture for object detection, modified to conform to the specifics of the scattering data. The model exhibits high accuracy in detecting diffraction features on noisy patterns with various experimental artifacts. We demonstrate our method on real-time tracking of organic-inorganic perovskite structure crystallization and test it on two applications: 1. the automated phase identification and unit-cell determination of two coexisting phases of Ruddlesden-Popper 2D perovskites, and 2. the fast tracking of MAPbI$_3$ perovskite formation. By design, our approach is equally suitable for other crystalline thin-film materials.