Confinement Specific Design of SOI Rib Waveguides with Submicron Dimensions and Single Mode Operation

Full-vectorial finite difference method with perfectly matched layers boundaries is used to identify the single mode operation region of submicron rib waveguides fabricated using sili-con-on-insulator material system. Achieving high mode power confinement factors is emphasized while maintaining the single mode operation. As opposed to the case of large cross-section rib waveguides, theoretical single mode conditions have been demonstrated to hold for sub-micron waveguides with accuracy approaching 100%. Both, the deeply and the shallowly etched rib waveguides have been considered and the single mode condition for entire sub-micrometer range is presented while adhering to design specific mode confinement requirements.