Abstract:Accurately measuring the size, morphology, and structure of nanoparticles is very important, because they are strongly dependent on their properties for many applications. In this paper, we present a deep-learning based method for nanoparticle measurement and classification trained from a small data set of scanning transmission electron microscopy images. Our approach is comprised of two stages: localization, i.e., detection of nanoparticles, and classification, i.e., categorization of their ultrastructure. For each stage, we optimize the segmentation and classification by analysis of the different state-of-the-art neural networks. We show how the generation of synthetic images, either using image processing or using various image generation neural networks, can be used to improve the results in both stages. Finally, the application of the algorithm to bimetallic nanoparticles demonstrates the automated data collection of size distributions including classification of complex ultrastructures. The developed method can be easily transferred to other material systems and nanoparticle structures.