Quantification and minimization of uncertainty is an important task in the design of electromagnetic devices, which comes with high computational effort. We propose a hybrid approach combining the reliability and accuracy of a Monte Carlo analysis with the efficiency of a surrogate model based on Gaussian Process Regression. We present two optimization approaches. An adaptive Newton-MC to reduce the impact of uncertainty and a genetic multi-objective approach to optimize performance and robustness at the same time. For a dielectrical waveguide, used as a benchmark problem, the proposed methods outperform classic approaches.