Semi-supervised semantic segmentation has witnessed remarkable advancements in recent years. However, existing algorithms are based on convolutional neural networks and directly applying them to Vision Transformers poses certain limitations due to conceptual disparities. To this end, we propose TokenMix, a data augmentation technique specifically designed for semi-supervised semantic segmentation with Vision Transformers. TokenMix aligns well with the global attention mechanism by mixing images at the token level, enhancing learning capability for contexutual information among image patches. We further incorporate image augmentation and feature augmentation to promote the diversity of augmentation. Moreover, to enhance consistency regularization, we propose a dual-branch framework where each branch applies both image augmentation and feature augmentation to the input image. We conduct extensive experiments across multiple benchmark datasets, including Pascal VOC 2012, Cityscapes, and COCO. Results suggest that the proposed method outperforms state-of-the-art algorithms with notably observed accuracy improvement, especially under the circumstance of limited fine annotations.